Vim yog cov khoom muaj txiaj ntsig zoo ntawm cov khaub zig muaj xws li cov kub siab tiv thaiv thiab corrosion tsis kam, lawv feem ntau siv nyob rau hauv ntau semiconductor cov khoom tseem ceeb. Ceramsonductor Tej yam chaw sib xyaw muaj xws li Shaamonductor Ceramic Ceramic, tej hub rastual, ceramic qhov cub, ceramic kab kab, ceramic kab kab, ceramic ceramic lub tshuab nqus tsev, thiab lwm yam.
1 .14 semiconductor ceramic caj npab
Nyob rau hauv tus txheej txheem ua haujlwm ntawm cov cuab yeej ua haujlwm, cov caj npab Ceramic yog xav tau thaum tuav dej Wafers, vim tias cov khoom siv hluav taws xob tsis tuaj yeem ua paug, yog li nws tau nqa tawm hauv ib qho chaw huab cua huv. Hauv kev nqus tsev ib puag ncig, feem ntau ntawm cov caj npab tshuab npaj los ntawm lwm cov ntaub ntawv tsis tuaj yeem ua raws cov caj npab nrog kub siab, hnav tsis kam thiab siab tawv. Feem ntau tib neeg siv cov siab purity alumina, silicon carbide los npaj cov caj npab, cov khoom siv kub no thiab lwm yam khoom siv lub cev, yog kev npaj ntawm cov khoom siv Ceramic. Piv nrog ob cov ntaub ntawv, kev ua yeeb yam ntawm Cleamic Ceric Ua los ntawm Silicon Carbide tau zoo dua li ntawm Alumina Ceramic Ceramina Ceramic Ceramina Ceramic Ceramic. Txawm li cas los xij, piv los ntawm cov khoom ntawm cov khoom siv teeb meem thiab kev sib tsoo, cov caj npab muaj txiaj ntsig ntau dua, thiab cov alumina ceramic muaj feem ntau siv ntau dua.
2. Ceramic substrate
Ceramic substrate yog tsuas yog siv nyob rau hauv cov khoom ntim hluav taws xob sib txawv, cov khoom siv laser hluav taws xob, lub teeb ntsuas kub ntim, ntim khoom siv fais fab, lwm yam khoom siv fais fab. Vim hais tias cov khoom siv dav dav tsis tuaj yeem tiv taus qhov kub thiab txias, lub zog hluav taws xob ua haujlwm siv hluav taws xob, siab lub zog, siab kev ntseeg tau ntawm cov khoom lag luam ceramic. Cov neeg feem ntau siv Alumina, Silicon nitride thiab lwm cov ntaub ntawv los npaj cov ceramic substrates.
3 Ceramic Nozzle
Nyob rau hauv HDP-CVD, cov tshuaj tiv thaiv roj nkag mus rau hauv cov tshuaj tiv thaiv chamber los ntawm cov ceramic nozzle txuas rau sab hauv thiab sab nraud ntawm lub chamber, yog li qhov zoo ntawm lub nozzle ncaj qha txiav txim siab purity thiab txaus tus nqi ntawm cov tshuaj tiv thaiv roj. Aluminium oxide thiab aluminium nitride feem ntau yog siv los npaj ceramic nozzles. Vim tias aluminium nitride ceramics muaj thermal conductivity zoo dua thiab thermal shock tsis kam tshaj aluminium oxide, lub nozzles yuav tsis ua rau impurity pollution vim plasma corrosion, thiab lawv yuav ua rau impurity muaj kuab paug vim thermal deformation los ntawm hnav cov khoom sib dhos. Qhov no ua kom cov nozzles tsis ua rau muaj kev pheej hmoo ntawm impurity paug rau cov tshuaj tiv thaiv roj thiab cov tshuaj tiv thaiv chamber, thiab tuaj yeem ua tau raws li cov kev cai thov hauv cov txheej txheem qib siab HDP-CVD cov cuab yeej.
4. Ceramic Windows
Lub qhov rais qhov rais sib xyaw ua ke yog qhov tseem ceeb siv nyob rau hauv semiconductor etching tshuab. Raws li lub chamber npog nyob rau hauv lub tshuab etching, nws yog siv hauv ntshav etching tshuab. Nws nyob nruab nrab ntawm lub chav ntawm lub tshuab etching thiab cov ntshav coupling coil. Nws yog tsim los rau kis cov RF (xov tooj cua fab Qhov txiaj ntsig zoo ceramic lub qhov rais muaj qis tsis muaj lub kaum ntse ntse qhov tseem ceeb (kev hloov pauv siab) ntawm RF thiab microwave ntau zaus. Yog tias tsis yog, lub zog yuav nqus tau thiab hloov dua siab tshiab dhau los, yog li ua rau muaj kev kub ntxhov ntau dhau los (poob ntawm RF zog) thiab cov khoom siv kub thiab cua sov ntau). Nyob rau hauv kev npaj ntawm cov khoom no, cov khoom siv ceramic advent ntawm high-purity alumina thiab yttrium oxide feem ntau yog ua tiav los ntawm kev ua tiav molding franing, sintering thiab ua kom tiav cov txheej txheem.
5. Ceramic kab noj hniav npog
Ceramic kab noj hniav npog yog ib qho kev ywj pheej ua haujlwm tivthaiv suav nrog ceramic dome, cua txias thiab electrode tswj qhov system. Nws yog ib qho ntawm cov khoom tseem ceeb hauv cov khoom siv ua yeeb yaj kiab nyias nyias ntawm 40nm thiab hauv qab no, thiab nws qhov kev ua tau zoo yog qhov tseem ceeb los xyuas kom meej wafer zoo. Ceramic kab noj hniav npog yog npog nyob rau sab sauv ntawm lub wafer, thiab CVD cov kab noj hniav yog kaw los tsim ib tug kaw chamber ib puag ncig. Cov tswv cuab kav hlau txais xov nrog cov coils nyob ib ncig ntawm lub tswb nrov tuaj yeem siv lub zog ntau zaus los tsim cov hluav taws xob tsim hluav taws xob los tsim ICP (plasma), thiab qhia nws mus rau hauv lub chamber los ntawm cov kab noj hniav ceramic kom ua tiav kev sib npaug ion thiab tiv thaiv kev vam meej. ntawm lub deposition film. Ceramic chamber npog plays lub luag haujlwm tseem ceeb hauv kev sib khi, sab hauv thiab sab nraud qhov sib txawv thiab kev huv ntawm cov tshuaj tiv thaiv chamber, thiab yog ib qho tseem ceeb ntawm cov khoom siv CVD.
6. Ceramic nqus nqus tsev vacuum
Feem ntau ntawm cov khoom sib xyaw sib xyaw ua ke nyob rau hauv cov khoom siv sicioductor yog cov khoom siv nqus tuab, tab sis lub tshuab nqus ntxig yog ib qho ceramic. Cov khoom siv semiconductor Silicon wafer yog cov khoom nyias, tawv thiab nkig, ob sab ntawm cov khoom yuav tsum tau ua hauv av thiab polished, thiab lwm yam. Cov neeg feem ntau siv lub tshuab nqus tsev nqus khob los nrhiav thiab clamp hom haujlwm no. Kev ua haujlwm ntawm lub tshuab nqus tsev nqus tau npaj los ntawm cov khoom siv ib txwm ua tsis tau raws li qhov xav tau ntawm kev siv. Tom qab kev txhim kho engineering thiab thev naus laus zis, tib neeg feem ntau siv cov ntaub ntawv ceramic los ua lub tshuab nqus tsev nqus. Lub tshuab nqus tsev nqus tshuab nqus tsev feem ntau yog cov qauv ntxeem tau, uas yog ua los ntawm ob qho khoom siv ceramic sib txuas ua ke. Cov porous ceramic phaj yog ntsia rau hauv qhov countersunk qhov ntawm lub hauv paus, uas yog sib koom thiab kaw nrog lub hauv paus, uas yog machined los ntawm cov khoom siv ceramic ntom ntom uas tsis ua pa. Txawm hais tias cov ntaub ntawv ntawm ob qhov chaw sib txawv, lawv cov hnav tsis kam thiab cov khoom siv kho tshuab zoo sib xws. Qhov no ua rau lub tshuab nqus tsev nqus tau raws li qhov xav tau ntawm kev siv.
Muaj ntau cov khoom lag luam sib xyaw rau cov semiconductor, peb tuaj yeem muab cov khoom raws li koj cov kev xav tau, txais tos koj sab laj.
